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* Semiconductor and Substrate Technologies are Combined and New Process Methods Adopted
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Build-up substrates: an idea born from semiconductor concepts

While there are many types of multilayer substrates, the type that appeared before the build-up substrate and is now widely used is the through-hole substrate (plated through-hole method). (See the figure at the right.) However, this method, in which through holes that pass through all layers are drilled, and connections between the conductor patterns on each layer are made by plating internally, has the following disadvantages.
1. Since the through holes are formed by drilling, there are limits to the degree of miniaturization.
2. Since the wiring associated with a through hole has a direct linear form, the wiring geometry is constrained and inflexible.
Given those problems, a new method, the build-up method, was developed in Japan at the start of the 1990s.
The build-up method can be said to have been born as an application of the layering technology used in semiconductor fabrication to substrates. On a core layer created with the normal plating through-hole method, insulating and conducting layers are stacked alternately to form the build-up layers.
In most cases holes are drilled with a laser (laser vias) and electrical connections are made to create the connections between the build-up layers and the core layer. Laser vias have smaller diameters than mechanically drilled holes and since the holes can be positioned at each layer, laser vias provide much greater flexibility than mechanically drilled vias.

Difficult Technical Issues Resolved by Sony's Overall Technical Prowess and
the Latest Processing Methods


Build-up substrates resolve the deficiencies of through-hole substrates and, due to their even higher wiring density and high-density mounting, make further miniaturization and thinner form factors possible. As a result the range of applications for this technology has grown and now they are widely used for interposer substrates in applications such as cellular phones and game equipment.
There are, however, only a very small number of companies that supply LAMINATE multilayer build-up interposer substrates. This is because of the high technical levels required for circuit formation, interlayer connection, leveling of the build-up layers, and other aspects, and thus assuring reliability is difficult.
Sony has now achieved in-house production of LAMINATE substrates using the latest processes by applying the Sony Group's semiconductor technology and know-how while at the same time taking full advantage of the fine fabrication technology fostered at the Neagari Plant of Sony Chemical & Information Device Corporation. The figure above shows representative technologies in these new processes. As opposed to existing processes for forming patterns by removing plating (etching process), the new process (pattern plating process) in which, inversely, the plating is grown, can create even more precise patterns.
Also, the LDI (Laser Direct Imaging) method, unlike the existing mask exposure method, does not require a photo mask. As a result, factors that lead to instability in the quality, such as the mask itself and variations in positioning precision, are excluded, and reliability can be radically improved.
Sony has introduced the most advanced technologies from the technologies and processing methods that have been actually applied worldwide, and has further added Sony's own arrangements to these technologies. Despite being a late entry to the field, Sony has acquired, in a short period, strengths that can compete with the leading suppliers of LAMINATE substrates in all aspects, including quality, price, and delivery time.

■ Types of interposer substrates

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