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Borderless Production
* CCD and CMOS Sensors: Supporting Market Needs with Borderless Production
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Figure 1 Stress Direction for Increased Transistor Carrier Mobility

Sony continues to maintain its industry-leading share in the CCD market. In contrast, we are expecting a significant increase in demand for Sony CMOS sensors, which combine previously unavailable high-speed imaging performance and high picture quality.
As the industry’s top supplier of image sensors, we have introduced the concept of “borderless production” at Kumamoto Technology Center to appropriately and flexibly respond to market needs. Basically, we have positioned the existing Building 1 as our CCD production line and Building 2 as our CMOS sensor production line. However, we have implemented a large number of innovations and technical devices so that if required CMOS sensors can be produced in Building 1 and CCDs can be produced in Building 2. Thus even though there are two buildings, the facility functions as a single line.


Facility Sharing
Although CCD and CMOS sensors have different device structures and operating principles, many of the several hundred process steps required for their manufacture are similar.
Sony made an effort to reduce the number of manufacturing equipment units that were unique to either CCD or CMOS sensor production, and created a system in which approximately 80% of the equipment can be shared.

Moving between Buildings
The connecting corridor between Building 1 and Building 2 is maintained at the same level of cleanliness as the clean rooms, and workers can come and go between the buildings while wearing their clean suits. The wafer transporters can also be used and operation as a single line is possible.

Creating a Common Production Management System
When we introduced the latest production management system, which supports automated lines, in Building 2, we replaced the system in the existing Building 1 with a new system that is the same as that in Building 2.
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Sony has made the decision to invest an additional 60 billion Yen in Building 2 over the 2007 to 2009 fiscal years, in particular, increasing the clean room area by another 5000 m2 and improving the manufacturing equipment as well.
* Fully Automated Production Line that Covers Equipment Management and Inspection
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In addition to automated wafer transport, Sony is pushing forward with full automation of production line operation in Building 2 so that the whole line can be operated with as few staff as possible. This will make it possible to quickly grasp variations in the manufacturing processes and is intended to prevent the occurrence of rejects in advance and suppress variations in product quality.

Automation of the Inspection Process
Sony has also introduced equipment that can make automatic judgments for the inspections that were previously performed visually.
This increases the precision and efficiency of the inspection process.

Equipment Engineering System (EES)
Previously, the presence or absence of faults was detected in the completion of the manufacturing process for film thickness or machining dimensions. That is, problems in manufacturing were recognized from the results of the process. However, with the Equipment Engineering System (EES), it is possible to become aware of abnormal indications even more quickly by monitoring, with an external server in real time, measurement values from sensors (such as temperature, gas flow, pressure, and valve operation sensors) installed in the production units.
This system is also useful as an analysis tool for quickly the basic causes of abnormalities due to equipment.
Furthermore, we are now introducing technologies that can perform predictive detection even for undetected faults by applying multivariate analysis to the sensor data, which consist of an enormous number of measurements.

Process Feedback (APC)
Sony is adopting technology that, if a variation in a manufacturing process is recognized, adjusts that process automatically for the next lot based on the result of analysis and thus stabilizes the quality.
APC: Advanced Process Control

Establishing Intelligent Production Plans
Which lots should be processed and with what timing to respond appropriately to changing market needs? Sony is introducing a system that formulates daily production plans at high precision.
* Thermal Efficiency is 2.4 Times the Normal Level. Sony Also Leads in Energy Efficiency.
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Through the adoption of equipment with good energy efficiency and overall control, Sony achieves, in Building 2, a yearly average of 7.5 in Coefficient of Performance (COP: (output energy) ÷ (input energy)), an index of energy efficiency. This corresponds to a COP value approximately 2.4 times that for a typical heat generating system.
Sony also collects rainwater from the roof of Building 2 and uses it for toilets and other uses, thus reducing annual water consumption by 1400 m3.
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click Thoroughgoing Quality Management Using Knowledge from Innovative Manufacturing
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See all articles with figures and tables. To PDF File
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